Radiation source

ABSTRACT

A radiation source includes: a hollow core optical fiber, a working medium; and a pulsed pump radiation source. The hollow core optical fiber has a body and has a hollow core. The working medium is disposed within the hollow core. The pulsed pump radiation source is arranged to produce pulsed pump radiation that is received by, and propagates through, the hollow core from an input end to an output end. One or more parameters of the pulsed pump radiation, the optical fiber and the working medium are configured to allow soliton self-compression of the pulsed pump radiation so as to change a spectrum of the pulsed pump radiation so as to form output radiation. In some embodiments, a length of the optical fiber is such that the output end substantially coincides with a position at which a temporal extent of the pulsed pump radiation is minimal.

This application is a continuation of U.S. patent application Ser. No.16/932,184, filed Jul. 17, 2020, which claims the benefit of priority ofEuropean patent application no. 19188036.8, filed Jul. 24, 2019, ofEuropean patent application no. 19198105.9, filed Sep. 18, 2019, and ofEuropean patent application no. 20151889.1, filed Jan. 15, 2020, each ofthe foregoing applications is incorporated herein in its entirety byreference.

FIELD

The present description relates to a radiation source. The radiationsource may be a supercontinuum source and may comprise an apparatus forreceiving input radiation and broadening a frequency range of the inputradiation so as to provide (broadband) output radiation.

BACKGROUND

A lithographic apparatus is a machine constructed to apply a desiredpattern onto a substrate. A lithographic apparatus can be used, forexample, in the manufacture of integrated circuits (ICs). A lithographicapparatus may, for example, project a pattern (also often referred to as“design layout” or “design”) at a patterning device (e.g., a mask) ontoa layer of radiation-sensitive material (resist) provided on a substrate(e.g., a wafer).

To project a pattern on a substrate a lithographic apparatus may useelectromagnetic radiation. The wavelength of this radiation determinesthe minimum size of features which can be formed on the substrate.Typical wavelengths currently in use are 365 nm (i-line), 248 nm, 193 nmand 13.5 nm. A lithographic apparatus, which uses extreme ultraviolet(EUV) radiation, having a wavelength within the range 4-20 nm, forexample 6.7 nm or 13.5 nm, may be used to form smaller features on asubstrate than a lithographic apparatus which uses, for example,radiation with a wavelength of 193 nm.

Low-k₁ lithography may be used to process features with dimensionssmaller than the classical resolution limit of a lithographic apparatus.In such process, the resolution formula may be expressed as CD=k₁×λ/NA,where λ is the wavelength of radiation employed, NA is the numericalaperture of the projection optics in the lithographic apparatus, CD isthe “critical dimension” (generally the smallest feature size printed,but in this case half-pitch) and k₁ is an empirical resolution factor.In general, the smaller k₁ the more difficult it becomes to reproducethe pattern on the substrate that resembles the shape and dimensionsplanned by a circuit designer in order to achieve particular electricalfunctionality and performance. To overcome these difficulties,sophisticated fine-tuning steps may be applied to the lithographicprojection apparatus and/or design layout. These include, for example,but not limited to, optimization of NA, customized illumination schemes,use of phase shifting patterning devices, various optimization of thedesign layout such as optical proximity correction (OPC, sometimes alsoreferred to as “optical and process correction”) in the design layout,or other methods generally defined as “resolution enhancementtechniques” (RET). Alternatively, tight control loops for controlling astability of the lithographic apparatus may be used to improvereproduction of the pattern at low k1.

In the field of lithography, many measurement systems may be used, bothwithin a lithographic apparatus and external to a lithographicapparatus. Generally, such a measurements system may use a radiationsource to irradiate a target with radiation, and a detection systemoperable to measure at least one property of a portion of the incidentradiation that scatters from the target. An example of a measurementsystem that is external to a lithographic apparatus is an inspectionapparatus or a metrology apparatus, which may be used to determine oneor more properties of a pattern previously projected onto a substrate bythe lithographic apparatus. Such an external inspection apparatus may,for example, comprise a scatterometer. Examples of measurement systemsthat may be provided within a lithographic apparatus include: atopography measurement system (also known as a level sensor); a positionmeasurement system (for example an interferometric device) fordetermining position of a reticle or wafer stage; and/or an alignmentsensor for determining a position of an alignment mark. Thesemeasurement devices may use electromagnetic radiation to perform themeasurement.

SUMMARY

Different types of radiation may be used to interrogate different typesof properties of a pattern. Some measurements system may use a broadbandradiation source. Such a broadband radiation source may be asupercontinuum source and may comprise an optical fiber having anon-linear medium through which a pulsed pump radiation beam ispropagated to broaden a spectrum of the radiation.

It may be desirable to provide alternative apparatus and methods for usein an apparatus for receiving input radiation and broadening a frequencyrange of the input radiation so as to provide (broadband) outputradiation that at least partially addresses one or more problemsassociated with the prior art whether identified herein or otherwise.

According to an aspect, there is provided a radiation source comprising:a hollow core optical fiber comprising a body having a hollow core; aworking medium disposed within the hollow core; and a pulsed pumpradiation source arranged to produce pulsed pump radiation that isreceived by, and propagates through, the hollow core from an input endto an output end, wherein parameters of the pulsed pump radiation, theoptical fiber and the working medium are configured to allow solitonself-compression of the pulsed pump radiation so as to change a spectrumof the pulsed pump radiation so as to form output radiation, and whereina length of the optical fiber is such that the output end substantiallycoincides with a position at which a temporal extent of the outputradiation is minimal.

According to an aspect, there is provided a radiation source comprising:a hollow core optical fiber comprising a body having a hollow core; aworking medium disposed within the hollow core; and a pulsed pumpradiation source arranged to produce pulsed pump radiation that isreceived by, and propagates through, the hollow core from an input endto an output end, wherein parameters of the pulsed pump radiation, theoptical fiber and the working medium are configured to allow solitonself-compression of the pulsed pump radiation so as to change a spectrumof the pulsed pump radiation so as to form output radiation, and whereina length of the optical fiber is such that the output end substantiallycoincides with a position at which a breadth of the spectrum of theoutput radiation is maximal.

The radiation sources are advantageous, for example, since they allow abroadband output radiation beam to be produced at the output end. Thismay be useful for use within metrology apparatus, for example within alithographic apparatus.

Some broadband radiation sources use arrangements which produce spectralbroadening of pulsed pump radiation but wherein parameters of the pulsedpump radiation, the optical fiber and the working medium are configuredto allow modulational instability to produce the spectral broadening.There are a number of reasons why modulational instability is used toproduce the spectral broadening. First, modulational instability isknown to produce broadband radiation having a relatively flatintensity-wavelength distribution. Such a broadband radiation source maybe referred to as a white light radiation source (due to the relativelyflat spectral intensity distribution). Second, modulational instabilitycan be achieved using relatively economical laser sources as the pumpradiation source.

On the other hand, soliton self-compression is a regime that is used forgenerating, from an input pump laser beam, one or more output laserbeams having a shifted wavelength. For example, soliton self-compressionis used for generating a dispersive wave having a different (shifted)wavelength. In a soliton self-compression regime (with a relatively lowsoliton number) a pulse of radiation can undergo significant temporalcompression, which is accompanied by spectral broadening. Eventually,the temporal compression will reach a maximal level (corresponding to aminimum temporal extent of the pulsed radiation) followed by temporalbroadening of the radiation. This temporal broadening is referred to assoliton fission as the higher order soliton splits into a plurality ofindividual solitons. The (higher order) soliton may oscillate betweenperiods of temporal compression and temporal broadening as it propagatesalong the hollow core optical fiber. Following temporal broadening,other effects can lead to shifting of the spectrum of the radiation. Forexample, self-steepening (which may accompany and aid the solitonself-compression) can lead to an optical shock which can seed dispersivewave emission. By tuning parameters of the system, a particular,desirable wavelength may be generated. For example, the wavelength maybe selected so as to be suitable for interacting with a particularmolecule and used in research experiments studying the molecule.Therefore, soliton self-compression is a regime for generating from aninput pump laser beam having first wavelength, an output radiation beamhaving a second, shifted wavelength.

It has been realized that during soliton self-compression, before thetemporal broadening (and before any dispersive waves are formed), thereis a (short-lived) transition period during which the radiationpropagating through the hollow-core fiber is broadband radiation.Furthermore, it has been realized that, although this broadbandradiation is short lived, by selecting the length of the optical fibersuch that the output end substantially coincides with a position atwhich the soliton self-compression has occurred but before subsequenttemporal broadening (soliton fission) and shifting of the spectrum, thisbroadband radiation can be output from the optical fiber so as toprovide a particularly stable broadband radiation source.

In particular, a particularly stable broadband radiation source can beprovided if the length of the optical fiber is such that the output endsubstantially coincides with a position at which a temporal extent ofthe pulsed pump radiation is minimal. It will be appreciated that asused herein the output end will substantially coincide with a positionat which a temporal extent of the pulsed pump radiation is minimal ifthe temporal extent of the pulsed pump radiation at the output end isthe smallest that it has been within the optical fiber. That is, theoutput end will substantially coincide with a position at which atemporal extent of the pulsed pump radiation is minimal if the temporalextent of the pulsed pump radiation has not yet increased (due tosoliton fission). It will be appreciated that, for a sufficiently longhollow core optical fiber, as radiation propagates through the hollowcore fiber the soliton may oscillate between periods of temporalcompression and temporal broadening. In between each period of temporalcompression and temporal broadening there may be a local minimum in thetemporal extent of the pulsed pump radiation. The output end willsubstantially coincide with a position at which a temporal extent of thepulsed pump radiation is minimal if the length of the hollow coreoptical fiber is such that the output end is positioned anywhere up toor including the first local minimum. Greatest spectral broadening maybe achieved if the output end substantially coincides with the firstlocal minimum.

Generally, after the soliton self-compression the breadth of thespectrum of the pulsed pump radiation may decrease and/or gaps in thespectrum may develop (for example as dispersive waves are emitted).Therefore, a particularly stable broadband radiation source can beprovided if the length of the optical fiber is such that the output endsubstantially coincides with a position at which a breadth of thespectrum of the pulsed pump radiation is maximal. It will be appreciatedthat as used here, the breadth of the spectrum of the pulsed pumpradiation (which may alternatively be referred to as the spectralbandwidth of the pulsed pump radiation) may be the width of the spectrumfor which a power density is above a threshold fraction of the maximum.For example, the breadth of the spectrum of the pulsed pump radiationmay be the width of the spectrum for which a power density is above0.0001 of the maximum (i.e. a spectrum that spans 40 decibels). Forexample, the breadth of the spectrum of the pulsed pump radiation may bethe width of the spectrum for which a power density is above 0.001 ofthe maximum (i.e. a spectrum that spans 30 decibels). For example, thebreadth of the spectrum of the pulsed pump radiation may be the width ofthe spectrum for which a power density is above 0.01 of the maximum(i.e. a spectrum that spans 20 decibels). For example, the breadth ofthe spectrum of the pulsed pump radiation may be the width of thespectrum for which a power density is above 0.1 of the maximum (i.e. aspectrum that spans 10 decibels). Alternatively, a particularly stablebroadband radiation source can be provided if the length of the opticalfiber is such that the output end substantially coincides with aposition at which the spectrum of the output radiation is substantiallycontinuous.

In contrast to chaotic-driven modulational instability systems,broadband radiation generated by such soliton self-compression will haveno shot-to-shot variations. As a result, advantageously, a stable outputspectrum can be generated using a single pulse (in contrast to severalpulses that would be required to produce some stability in the outputbeam of a modulational instability system).

It will be appreciated that, as the radiation propagates through thehollow core fiber, the soliton may oscillate between periods of temporalcompression and temporal broadening. In between each period of temporalcompression and temporal broadening there may be a local minimum in thetemporal extent of the pulsed pump radiation. In principle, the lengthof the optical fiber may be such that the output end substantiallycoincides with any such position of minimal temporal extent of thepulsed pump radiation. However, the most stable output spectrum (forexample against pulse to pulse variations) may be provided by when theoutput end coincides with the first position of minimal temporal extentof the pulsed pump radiation.

The length of the optical fiber may be such that the output endsubstantially coincides with a first local minimum of a temporal extentof the pulsed pump radiation. It will be appreciated that the positionof the first local minimum of a temporal extent of the pulsed pumpradiation may be dependent on a number of factors including, forexample, the parameters of the fiber (for example a core diameter and alength of the fiber), the working medium (for example type of gas andpressure) and the pulsed pump radiation (for example pulse energy andpulse duration). In order for the output end to substantially coincidewith the first local minimum of a temporal extent of the pulsed pumpradiation, the output end may be disposed sufficiently close to thefirst local minimum of a temporal extent of the pulsed pump radiationsuch that the compressed pulse has not yet expanded or dispersed by 200%of the first local minimum of a temporal extent of the pulsed pumpradiation. For example, the output end may be disposed sufficientlyclose to the first local minimum of a temporal extent of the pulsed pumpradiation such that the compressed pulse has not yet expanded ordispersed by 100% of the first local minimum of a temporal extent of thepulsed pump radiation. For example, the output end may be disposedsufficiently close to the first local minimum of a temporal extent ofthe pulsed pump radiation such that the compressed pulse has not yetexpanded or dispersed by 50% of the first local minimum of a temporalextent of the pulsed pump radiation. For example, the output end may bedisposed sufficiently close to the first local minimum of a temporalextent of the pulsed pump radiation such that the compressed pulse hasnot yet expanded or dispersed by 10% of the first local minimum of atemporal extent of the pulsed pump radiation. For example, the outputend may be disposed sufficiently close to the first local minimum of atemporal extent of the pulsed pump radiation such that the compressedpulse has not yet expanded or dispersed by 5% of the first local minimumof a temporal extent of the pulsed pump radiation.

A pulse duration of the input pulsed pump radiation may be greater than50 fs. For example, the pulse duration of the input pulsed pumpradiation may be greater than 100 fs, for example of the order of 150fs.

A pulse energy of the input pulsed pump radiation may be less than 1 μJ.For example, the pulse energy of the input pulsed pump radiation may beless than 0.75 μJ. For example, the pulse energy of the input pulsedpump radiation may be less than 0.5 μJ, for example of the order of 0.4μJ.

The input pulsed pump radiation may have any desired wavelength. In someembodiments, the input pulsed pump radiation may have a wavelength ofaround 1 μm.

According to an aspect, there is provided a radiation source comprising:a hollow core optical fiber comprising a body having a hollow core; aworking medium disposed within the hollow core; and a pulsed pumpradiation source arranged to produce pulsed pump radiation that isreceived by, and propagates through, the hollow core from an input endto an output end, wherein parameters of the pulsed pump radiation, theoptical fiber and the working medium are configured to allow solitonself-compression of the pulsed pump radiation so as to change a spectrumof the pulsed pump radiation, and wherein a pulse duration of the inputpulsed pump radiation is greater than 50 fs.

For example, the pulse duration of the input pulsed pump radiation maybe greater than 100 fs, for example of the order of 150 fs.

According to an aspect, there is provided a radiation source comprising:a hollow core optical fiber comprising a body having a hollow core; aworking medium disposed within the hollow core; and a pulsed pumpradiation source arranged to produce pulsed pump radiation that isreceived by, and propagates through, the hollow core from an input endto an output end, wherein parameters of the pulsed pump radiation, theoptical fiber and the working medium are configured to allow solitonself-compression of the pulsed pump radiation so as to change a spectrumof the pulsed pump radiation, and wherein a pulse energy of the inputpulsed pump radiation is less than 1 μJ.

For example, the pulse energy of the input pulsed pump radiation may beless than 0.75 μJ. For example, the pulse energy of the input pulsedpump radiation may be less than 0.5 μJ, for example of the order of 0.4μJ.

The radiation sources are advantageous, for example, since they allow abroadband output radiation beam to be produced at the output end. Thismay be useful for use within metrology apparatus, for example within alithographic apparatus.

The radiation sources are, for example, more stable, for example againstpulse to pulse variations, than broadband radiation sources whichproduce spectral broadening of pulsed pump radiation under amodulational instability regime.

The soliton order N of the input pulsed pump radiation is a convenientparameter that can be used to distinguish conditions under whichspectral broadening is dominated by modulational instability andconditions under which spectral broadening is dominated by solitonself-compression. Spectral broadening is typically dominated bymodulational instability when N>>20 whereas spectral broadening istypically dominated by soliton self-compression when N<<20.

Therefore, for arrangements which use soliton self-compression it isdesirable to produce input pulsed pump radiation with a low solitonorder N. Furthermore, the soliton order of the input pulsed pumpradiation is proportional to the pulse duration of the input pulsed pumpradiation. Therefore, generally arrangements wherein solitonself-compression dominates, typically the pulse duration of the inputpulsed pump radiation is reduced to of the order of 30 fs or less. Torealize such an arrangement, typically a high-power femtosecond-fiberlasers or Ti:Sapph amplifiers are used as the pulsed pump radiationsource. The laser heads are relatively bulky (a femtosecond-fiber laserhead has, for example, dimensions of 60×40×20 cm) and, in most cases,require external controllers and water chillers. In addition, suchlasers are relatively cost intensive.

It has been realized that the soliton order of the input pulsed pumpradiation can alternatively be reduced by reducing the pulse energy ofthe input pulsed pump radiation. For example, if all other parametersremain constant, by reducing the pulse energy of the input pulsed pumpradiation by a factor of α, the same soliton order can be achieved usinga pulse duration that is increased by a factor of α. This reduction ofthe pulse energy is contrary to the teachings of the prior art whereinit is taught to use increased pulse energy. In the art, radiationsources using soliton self-compression are typically used for researchapplications such as, for example atomic or molecular spectroscopywherein it is desirable to maximize the pulse energy of the radiationsource.

In an aspect, a soliton order of the input pulsed pump radiation may beless than 20.

In an aspect, the working medium may be configured to produce anomalousdispersion. That is, the working medium may have a negative group delaydispersion parameter.

In an aspect, the hollow core optical fiber may comprise a claddingportion surrounding the hollow core, and the cladding portion maycomprise a plurality of anti-resonance elements for guiding radiationthrough the hollow core. Each of the plurality of anti-resonanceelements may comprise a capillary.

The plurality of anti-resonance elements of the cladding portion may bedisposed in a ring structure around the hollow core.

The plurality of anti-resonance elements may be arranged so that each ofthe anti-resonance elements is not in contact with any of the otheranti-resonance elements.

In an aspect, the working medium may comprise a noble gas. For example,the working medium may comprise one or more selected from: argon,krypton, neon, helium and/or xenon.

In an aspect, the working medium may comprise a molecular gas. Forexample, the working medium may comprise one or more selected from: N₂,O₂, CH₄ and/or SF₆.

According to an aspect, there is provided a metrology arrangement fordetermining a parameter of interest of a structure on a substrate, themetrology arrangement comprising: a radiation source as describedherein; an illumination sub-system for illuminating the structure on thesubstrate using the broadband output radiation; and a detectionsub-system for detecting a portion of radiation scattered and/orreflected by the structure, and for determining the parameter ofinterest from said portion of radiation.

According to an aspect, there is provided a lithographic apparatuscomprising a metrology arrangement as described herein.

According to an aspect, there is provided a method of selecting anoperating regime of a radiation source, the radiation source comprising:a hollow core optical fiber comprising a body having a hollow core; aworking medium disposed within the hollow core; and a pulsed pumpradiation source arranged to produce pulsed pump radiation that isreceived by, and propagates through, the hollow core from an input endto an output end, wherein the method comprises: selecting one or moreparameters of one or more selected from: the pulsed pump radiation, theoptical fiber and/or the working medium so as to allow solitonself-compression of the pulsed pump radiation so as to change a spectrumof the pulsed pump radiation so as to form output radiation, and furtherwherein the one or more parameters are selected such that a length ofthe optical fiber is such that the output end substantially coincideswith a position at which: a temporal extent of the output radiation isminimal, and/or a breadth of the spectrum of the output radiation ismaximal.

The method provides a method by which a radiation source as describedherein can be designed.

In an initial application of the method, one or more parameters of theoptical fiber may be selected. Once the optical fiber has beenmanufactured, its one or more parameters may be determined, for exampleby measurement, and can be input as constraints into a secondapplication of the method.

One or more parameters of the optical fiber may be fixed and one or moreparameters of the pulsed pump radiation and/or the working medium may beselected. This may allow the one or more working parameters of thepulsed pump radiation and/or the working medium to be selected when oneor more parameters of the optical fiber are fixed (for example, once theoptical fiber has been manufactured).

BRIEF DESCRIPTION OF THE DRAWINGS

Embodiments of the invention will now be described, by way of exampleonly, with reference to the accompanying schematic drawings, in which:

FIG. 1 depicts a schematic overview of a lithographic apparatus;

FIG. 2 depicts a schematic overview of a lithographic cell;

FIG. 3 depicts a schematic representation of holistic lithography,representing a cooperation between three key technologies to optimizesemiconductor manufacturing;

FIG. 4 depicts a schematic overview of a scatterometer metrology tool;

FIG. 5 depicts a schematic overview of a level sensor metrology tool;

FIG. 6 depicts a schematic overview of an alignment sensor metrologytool;

FIG. 7 is a schematic cross sectional view of a hollow core opticalfiber that may form part of a radiation source according to anembodiment in a transverse plane (i.e. perpendicular to an axis of theoptical fiber);

FIG. 8 depicts a schematic representation of a radiation sourceaccording to an embodiment for providing broadband output radiation;

FIGS. 9A and 9B show a simulation of temporal and spectral evolution ofa pulse of radiation within the hollow core optical fiber of theradiation source shown in FIG. 8 when a second, output end of theoptical fiber coincides with a position at which the temporal extent ofradiation is minimal;

FIG. 9C shows a simulation of the output spectrum of the radiationsource with the same parameters as the simulation shown in FIGS. 9A and9B;

FIG. 10A shows a simulation of spectral evolution of the pulse ofradiation within the hollow core optical fiber of the radiation sourceshown in FIG. 8 that would be experienced if the length of the opticalfiber was increased so that the second, output end of the optical fiberdoes not coincide with the position at which the temporal extent ofradiation is minimal; and

FIG. 10B shows a simulation of the output spectrum of the radiationsource with the same parameters as the simulation shown in FIG. 10A.

DETAILED DESCRIPTION

In the present document, the terms “radiation” and “beam” are used toencompass all types of electromagnetic radiation, including ultravioletradiation (e.g. with a wavelength of 365, 248, 193, 157 or 126 nm) andEUV (extreme ultra-violet radiation, e.g. having a wavelength in therange of about 5-100 nm).

The term “reticle”, “mask” or “patterning device” as employed in thistext may be broadly interpreted as referring to a generic patterningdevice that can be used to endow an incoming radiation beam with apatterned cross-section, corresponding to a pattern that is to becreated in a target portion of the substrate. The term “light valve” canalso be used in this context. Besides the classic mask (transmissive orreflective, binary, phase-shifting, hybrid, etc.), examples of othersuch patterning devices include a programmable mirror array and aprogrammable LCD array.

FIG. 1 schematically depicts a lithographic apparatus LA. Thelithographic apparatus LA includes an illumination system (also referredto as illuminator) IL configured to condition a radiation beam B (e.g.,UV radiation, DUV radiation or EUV radiation), a mask support (e.g., amask table) T constructed to support a patterning device (e.g., a mask)MA and connected to a first positioner PM configured to accuratelyposition the patterning device MA in accordance with certain parameters,a substrate support (e.g., a wafer table) WT constructed to hold asubstrate (e.g., a resist coated wafer) W and connected to a secondpositioner PW configured to accurately position the substrate support inaccordance with certain parameters, and a projection system (e.g., arefractive projection lens system) PS configured to project a patternimparted to the radiation beam B by patterning device MA onto a targetportion C (e.g., comprising one or more dies) of the substrate W.

In operation, the illumination system IL receives a radiation beam froma radiation source SO, e.g. via a beam delivery system BD. Theillumination system IL may include various types of optical components,such as refractive, reflective, magnetic, electromagnetic,electrostatic, and/or other types of optical components, or anycombination thereof, for directing, shaping, and/or controllingradiation. The illuminator IL may be used to condition the radiationbeam B to have a desired spatial and angular intensity distribution inits cross section at a plane of the patterning device MA.

The term “projection system” PS used herein should be broadlyinterpreted as encompassing various types of projection system,including refractive, reflective, catadioptric, anamorphic, magnetic,electromagnetic and/or electrostatic optical systems, or any combinationthereof, as appropriate for the exposure radiation being used, and/orfor other factors such as the use of an immersion liquid or the use of avacuum. Any use of the term “projection lens” herein may be consideredas synonymous with the more general term “projection system” PS.

The lithographic apparatus LA may be of a type wherein at least aportion of the substrate may be covered by a liquid having a relativelyhigh refractive index, e.g., water, so as to fill a space between theprojection system PS and the substrate W—which is also referred to asimmersion lithography. More information on immersion techniques is givenin U.S. Pat. No. 6,952,253, which is incorporated herein in its entiretyby reference.

The lithographic apparatus LA may also be of a type having two or moresubstrate supports WT (also named “dual stage”). In such “multiplestage” machine, the substrate supports WT may be used in parallel,and/or steps in preparation of a subsequent exposure of the substrate Wmay be carried out on the substrate W located on one of the substratesupport WT while another substrate W on the other substrate support WTis being used for exposing a pattern on the other substrate W.

In addition to the substrate support WT, the lithographic apparatus LAmay comprise a measurement stage. The measurement stage is arranged tohold a sensor and/or a cleaning device. The sensor may be arranged tomeasure a property of the projection system PS or a property of theradiation beam B. The measurement stage may hold multiple sensors. Thecleaning device may be arranged to clean part of the lithographicapparatus, for example a part of the projection system PS or a part of asystem that provides the immersion liquid. The measurement stage maymove beneath the projection system PS when the substrate support WT isaway from the projection system PS.

In operation, the radiation beam B is incident on the patterning device,e.g. mask, MA which is held on the mask support T, and is patterned bythe pattern (design layout) present on patterning device MA. Havingtraversed the mask MA, the radiation beam B passes through theprojection system PS, which focuses the beam onto a target portion C ofthe substrate W. With the aid of the second positioner PW and a positionmeasurement system IF, the substrate support WT can be moved accurately,e.g., so as to position different target portions C in the path of theradiation beam B at a focused and aligned position. Similarly, the firstpositioner PM and possibly another position sensor (which is notexplicitly depicted in FIG. 1) may be used to accurately position thepatterning device MA with respect to the path of the radiation beam B.Patterning device MA and substrate W may be aligned using mask alignmentmarks M1, M2 and substrate alignment marks P1, P2. Although thesubstrate alignment marks P1, P2 as illustrated occupy dedicated targetportions, they may be located in spaces between target portions.Substrate alignment marks P1, P2 are known as scribe-lane alignmentmarks when these are located between the target portions C.

As shown in FIG. 2 the lithographic apparatus LA may form part of alithographic cell LC, also sometimes referred to as a lithocell or(litho)cluster, which often also includes apparatus to perform pre- andpost-exposure processes on a substrate W. Conventionally these includespin coaters SC to deposit resist layers, developers DE to developexposed resist, chill plates CH and bake plates BK, e.g. forconditioning the temperature of substrates W e.g. for conditioningsolvents in the resist layers. A substrate handler, or robot, RO picksup substrates W from input/output ports I/O1, I/O2, moves them betweenthe different process apparatus and delivers the substrates W to theloading bay LB of the lithographic apparatus LA. The devices in thelithocell, which are often also collectively referred to as the track,are typically under the control of a track control unit TCU that initself may be controlled by a supervisory control system SCS, which mayalso control the lithographic apparatus LA, e.g. via lithography controlunit LACU.

In order for the substrates W exposed by the lithographic apparatus LAto be exposed correctly and consistently, it is desirable to inspectsubstrates to measure properties of patterned structures, such asoverlay errors between subsequent layers, line thicknesses, criticaldimensions (CD), etc. For this purpose, inspection tools (not shown) maybe included in the lithocell LC. If errors are detected, adjustments,for example, may be made to exposures of subsequent substrates or toother processing steps that are to be performed on the substrates W,especially if the inspection is done before other substrates W of thesame batch or lot are still to be exposed or processed.

An inspection apparatus, which may also be referred to as a metrologyapparatus, is used to determine properties of the substrates W, and inparticular, how properties of different substrates W vary or howproperties associated with different layers of the same substrate W varyfrom layer to layer. The inspection apparatus may alternatively beconstructed to identify defects on the substrate W and may, for example,be part of the lithocell LC, or may be integrated into the lithographicapparatus LA, or may even be a stand-alone device. The inspectionapparatus may measure the properties on a latent image (image in aresist layer after the exposure), or on a semi-latent image (image in aresist layer after a post-exposure bake step PEB), or on a developedresist image (in which the exposed or unexposed parts of the resist havebeen removed), or even on an etched image (after a pattern transfer stepsuch as etching).

Typically the patterning process in a lithographic apparatus LA is oneof the most critical steps in the processing which requires highaccuracy of dimensioning and placement of structures on the substrate W.To ensure this high accuracy, three systems may be combined in a socalled “holistic” control environment as schematically depicted in FIG.3. One of these systems is the lithographic apparatus LA which is(virtually) connected to a metrology tool MT (a second system) and to acomputer system CL (a third system). The key of such “holistic”environment is to optimize the cooperation between these three systemsto enhance the overall process window and provide tight control loops toensure that the patterning performed by the lithographic apparatus LAstays within a process window. The process window defines a range ofprocess parameters (e.g. dose, focus, overlay) within which a specificmanufacturing process yields a defined result (e.g. a functionalsemiconductor device)—typically within which the process parameters inthe lithographic process or patterning process are allowed to vary.

The computer system CL may use (part of) the design layout to bepatterned to predict which resolution enhancement techniques to use andto perform computational lithography simulations and calculations todetermine which mask layout and lithographic apparatus settings achievethe largest overall process window of the patterning process (depictedin FIG. 3 by the double arrow in the first scale SC1). Typically, theresolution enhancement techniques are arranged to match the patterningpossibilities of the lithographic apparatus LA. The computer system CLmay also be used to detect where within the process window thelithographic apparatus LA is currently operating (e.g. using input fromthe metrology tool MT) to predict whether defects may be present due toe.g. sub-optimal processing (depicted in FIG. 3 by the arrow pointing“0” in the second scale SC2).

The metrology tool MT may provide input to the computer system CL toenable accurate simulations and predictions, and may provide feedback tothe lithographic apparatus LA to identify possible drifts, e.g. in acalibration status of the lithographic apparatus LA (depicted in FIG. 3by the multiple arrows in the third scale SC3). Different types ofmetrology tools MT for measuring one or more properties relating to alithographic apparatus and/or a substrate to be patterned will now bedescribed.

In lithographic processes, it is desirable to make frequentlymeasurements of the structures created, e.g., for process control andverification. Tools to make such measurement are typically calledmetrology tools MT. Different types of metrology tools MT for makingsuch measurements are known, including scanning electron microscopes orvarious forms of scatterometer metrology tools MT. Scatterometers areversatile instruments which allow measurements of the parameters of alithographic process by having a sensor in the pupil or a conjugateplane with the pupil of the objective of the scatterometer, measurementsusually referred as pupil based measurements, or by having the sensor inthe image plane or a plane conjugate with the image plane, in which casethe measurements are usually referred as image or field basedmeasurements. Such scatterometers and the associated measurementtechniques are further described in U.S. Patent Application PublicationNos. US20100328655, US2011102753A1, US20120044470A, US20110249244,US20110026032 and in European Patent Application Publication No.EP1,628,164A, each of the foregoing patent documents incorporated hereinin its entirety by reference. Aforementioned scatterometers may measuregratings using radiation from soft x-ray and visible to near-IRwavelength range.

In a first embodiment, the scatterometer MT is an angular resolvedscatterometer. In such a scatterometer reconstruction methods may beapplied to the measured signal to reconstruct or calculate properties ofthe grating. Such reconstruction may, for example, result fromsimulating interaction of scattered radiation with a mathematical modelof the target structure and comparing the simulation results with thoseof a measurement. Parameters of the mathematical model are adjusteduntil the simulated interaction produces a diffraction pattern similarto that observed from the real target.

In a second embodiment, the scatterometer MT is a spectroscopicscatterometer MT. In such spectroscopic scatterometer MT, the radiationemitted by a radiation source is directed onto the target and thereflected or scattered radiation from the target is directed to aspectrometer detector, which measures a spectrum (i.e. a measurement ofintensity as a function of wavelength) of the specular reflectedradiation. From this data, the structure or profile of the target givingrise to the detected spectrum may be reconstructed, e.g. by RigorousCoupled Wave Analysis and non-linear regression or by comparison with alibrary of simulated spectra.

In a third embodiment, the scatterometer MT is an ellipsometricscatterometer. The ellipsometric scatterometer allows for determiningparameters of a lithographic process by measuring scattered radiationfor each polarization state. Such metrology apparatus emits polarizedradiation (such as linear, circular, or elliptic) by using, for example,appropriate polarization filters in the illumination section of themetrology apparatus. A source suitable for the metrology apparatus mayprovide polarized radiation as well. Various embodiments of existingellipsometric scatterometers are described in U.S. Patent ApplicationPublication Nos. 2007-0296960, 2008-0198380, 2009-0168062, 2010-0007863, 2011-0032500, 2011-0102793, 2011-0188020, 2012-0044495, 2013-0162996and 2013-0308142, each of which is incorporated herein in its entiretyby reference.

In one embodiment of the scatterometer MT, the scatterometer MT isadapted to measure the overlay of two misaligned gratings or periodicstructures by measuring asymmetry in the reflected spectrum and/or thedetection configuration, the asymmetry being related to the extent ofthe overlay. The two (typically overlapping) grating structures may beapplied in two different layers (not necessarily consecutive layers),and may be formed substantially at the same position on the wafer. Thescatterometer may have a symmetrical detection configuration asdescribed e.g. in European Patent Application Publication No.EP1,628,164, which is incorporated herein in its entirety by reference,such that any asymmetry is clearly distinguishable. This provides astraightforward way to measure misalignment in gratings. Furtherexamples for measuring overlay error between the two layers containingperiodic structures as target is measured through asymmetry of theperiodic structures may be found in PCT Patent Application PublicationNo. WO 2011/012624 and U.S. Patent Application No. US 20160161863, eachof which is incorporated herein in its entirety by reference.

Other parameters of interest may be focus and dose. Focus and dose maybe determined simultaneously by scatterometry (or alternatively byscanning electron microscopy) as described in U.S. Patent ApplicationPublication No. US2011-0249244, incorporated herein in its entirety byreference. A single structure may be used which has a unique combinationof critical dimension and sidewall angle measurements for each point ina focus energy matrix (FEM—also referred to as Focus Exposure Matrix).If these unique combinations of critical dimension and sidewall angleare available, the focus and dose values may be uniquely determined fromthese measurements.

A metrology target may be an ensemble of composite gratings, formed by alithographic process, mostly in resist, but also after etch process forexample. Typically the pitch and line-width of the structures in thegratings strongly depend on the measurement optics (in particular the NAof the optics) to be able to capture diffraction orders coming from themetrology targets. As indicated earlier, the diffracted signal may beused to determine shifts between two layers (also referred to ‘overlay’)or may be used to reconstruct at least part of the original grating asproduced by the lithographic process. This reconstruction may be used toprovide guidance of the quality of the lithographic process and may beused to control at least part of the lithographic process. Targets mayhave smaller sub-segmentation which are configured to mimic dimensionsof the functional part of the design layout in a target. Due to thissub-segmentation, the targets will behave more similar to the functionalpart of the design layout such that the overall process parametermeasurements resembles the functional part of the design layout better.The targets may be measured in an underfilled mode or in an overfilledmode. In the underfilled mode, the measurement beam generates a spotthat is smaller than the overall target. In the overfilled mode, themeasurement beam generates a spot that is larger than the overalltarget. In such overfilled mode, it may also be possible to measuredifferent targets simultaneously, thus determining different processingparameters at the same time.

Overall measurement quality of a lithographic parameter using a specifictarget is at least partially determined by the measurement recipe usedto measure this lithographic parameter. The term “substrate measurementrecipe” may include one or more parameters of the measurement itself,one or more parameters of the one or more patterns measured, or both.For example, if the measurement used in a substrate measurement recipeis a diffraction-based optical measurement, one or more of theparameters of the measurement may include the wavelength of theradiation, the polarization of the radiation, the incident angle ofradiation relative to the substrate, the orientation of radiationrelative to a pattern on the substrate, etc. One of the criteria toselect a measurement recipe may, for example, be a sensitivity of one ofthe measurement parameters to processing variations. More examples aredescribed in U.S. Patent Application Publication Nos. US 2016-0161863and US 2016-0370717, each of which is incorporated herein its entiretyby reference.

A metrology apparatus, such as a scatterometer SM1, is depicted in FIG.4. It comprises a broadband (e.g., white light) radiation projector 2which projects radiation onto a substrate 6. The reflected or scatteredradiation is passed to a spectrometer detector 4, which measures aspectrum 10 (i.e. a measurement of intensity In1 as a function ofwavelength λ) of the specular reflected radiation. From this data, thestructure or profile giving rise to the detected spectrum may bereconstructed by processing unit PU, e.g. by Rigorous Coupled WaveAnalysis and non-linear regression or by comparison with a library ofsimulated spectra as shown at the bottom of FIG. 4. In general, for thereconstruction, the general form of the structure is known and someparameters are assumed from knowledge of the process by which thestructure was made, leaving only a few parameters of the structure to bedetermined from the scatterometry data. Such a scatterometer may beconfigured as a normal-incidence scatterometer or an oblique-incidencescatterometer.

In lithographic processes, it is desirable to make frequentlymeasurements of the structures created, e.g., for process control andverification. Various tools for making such measurements are known,including scanning electron microscopes or various forms of metrologyapparatuses, such as scatterometers. Examples of known scatterometersoften rely on provision of dedicated metrology targets, such asunderfilled targets (a target, in the form of a simple grating oroverlapping gratings in different layers, that is large enough that ameasurement beam generates a spot that is smaller than the grating) oroverfilled targets (whereby the illumination spot partially orcompletely contains the target). Further, the use of metrology tools,for example an angular resolved scatterometter illuminating anunderfilled target, such as a grating, allows the use of so-calledreconstruction methods where the properties of the grating can becalculated by simulating interaction of scattered radiation with amathematical model of the target structure and comparing the simulationresults with those of a measurement. Parameters of the model areadjusted until the simulated interaction produces a diffraction patternsimilar to that observed from the real target.

Scatterometers are versatile instruments which allow measurements of theparameters of a lithographic process by having a sensor in the pupil ora conjugate plane with the pupil of the objective of the scatterometer,measurements usually referred as pupil based measurements, or by havingthe sensor in the image plane or a plane conjugate with the image plane,in which case the measurements are usually referred as image or fieldbased measurements. Such scatterometers and the associated measurementtechniques are further described in U.S. Patent Application PublicationNos. US 2010-0328655, US 2011-102753, US 2012-0044470, US 2011-0249244,and US 2011-0026032 and in European Patent Application Publication No.EP1,628,164A, each of which is incorporated herein in its entiretyreference. Aforementioned scatterometers can measure in one imagemultiple targets from multiple gratings using radiation from soft x-rayand visible to near-IR wave range.

A topography measurement system, level sensor or height sensor, andwhich may be integrated in the lithographic apparatus, is arranged tomeasure a topography of a top surface of a substrate (or wafer). A mapof the topography of the substrate, also referred to as height map, maybe generated from these measurements indicating a height of thesubstrate as a function of the position on the substrate. This heightmap may subsequently be used to correct the position of the substrateduring transfer of the pattern on the substrate, in order to provide anaerial image of the patterning device in a properly focus position onthe substrate. It will be understood that “height” in this contextrefers to a dimension broadly out of the plane to the substrate (alsoreferred to as Z-axis). Typically, the level or height sensor performsmeasurements at a fixed location (relative to its own optical system)and a relative movement between the substrate and the optical system ofthe level or height sensor results in height measurements at locationsacross the substrate.

An example of a level or height sensor LS is schematically shown in FIG.5, which illustrates only the principles of operation. In this example,the level sensor comprises an optical system, which includes aprojection unit LSP and a detection unit LSD. The projection unit LSPcomprises a radiation source LSO providing a beam of radiation LSB whichis imparted by a projection grating PGR of the projection unit LSP. Theradiation source LSO may be, for example, a narrowband or broadbandradiation source, such as a supercontinuum radiation source, polarizedor non-polarized, pulsed or continuous, such as a polarized ornon-polarized laser beam. The radiation source LSO may include aplurality of radiation sources having different colors, or wavelengthranges, such as a plurality of LEDs. The radiation source LSO of thelevel sensor LS is not restricted to visible radiation, but mayadditionally or alternatively encompass UV and/or IR radiation and anyrange of wavelengths suitable to reflect from a surface of a substrate.

The projection grating PGR is a periodic grating comprising a periodicstructure resulting in a beam of radiation BE1 having a periodicallyvarying intensity. The beam of radiation BE1 with the periodicallyvarying intensity is directed towards a measurement location MLO on asubstrate W having an angle of incidence ANG with respect to an axisperpendicular (Z-axis) to the incident substrate surface between 0degrees and 90 degrees, typically between 70 degrees and 80 degrees. Atthe measurement location MLO, the patterned beam of radiation BE1 isreflected by the substrate W (indicated by arrows BE2) and directed asradiation BE2 towards the detection unit LSD.

In order to determine the height level at the measurement location MLO,the level sensor further comprises a detection system comprising adetection grating DGR, a detector DET and a processing unit (not shown)for processing an output signal of the detector DET. The detectiongrating DGR may be identical to the projection grating PGR. The detectorDET produces a detector output signal indicative of the radiationreceived, for example indicative of the intensity of the radiationreceived, such as a photodetector, or representative of a spatialdistribution of the intensity received, such as a camera. The detectorDET may comprise any combination of one or more detector types.

By means of triangulation techniques, the height level at themeasurement location MLO can be determined. The detected height level istypically related to the signal strength as measured by the detectorDET, the signal strength having a periodicity that depends, among otherthings, on the design of the projection grating PGR and the (oblique)angle of incidence ANG.

The projection unit LSP and/or the detection unit LSD may includefurther optical elements, such as lenses and/or mirrors, along the pathof the patterned beam of radiation between the projection grating PGRand the detection grating DGR (not shown).

In an embodiment, the detection grating DGR may be omitted, and thedetector DET may be placed at the position where the detection gratingDGR is located. Such a configuration provides a more direct detection ofthe image of the projection grating PGR.

In order to cover the surface of the substrate W effectively, a levelsensor LS may be configured to project an array of measurement beams BE1onto the surface of the substrate W, thereby generating an array ofmeasurement areas MLO or spots covering a larger measurement range.

Various height sensors of a general type are disclosed for example inU.S. Pat. Nos. 7,265,364 and 7,646,471, each of which is incorporatedherein in its entirety by reference. A height sensor using UV radiationinstead of visible or infrared radiation is disclosed in U.S. PatentApplication Publication No. US2010233600A1, which is incorporated hereinin its entirety by reference. In PCT Patent Application Publication No.WO 2016102127A1, which is incorporated herein in its entirety byreference, a compact height sensor is described which uses amulti-element detector to detect and recognize the position of a gratingimage, without needing a detection grating.

The position measurement system PMS may comprise any type of sensor thatis suitable to determine a position of the substrate support WT. Theposition measurement system PMS may comprise any type of sensor that issuitable to determine a position of the mask support MT. The sensor maybe an optical sensor such as an interferometer or an encoder. Theposition measurement system PMS may comprise a combined system of aninterferometer and an encoder. The sensor may be another type of sensor,such as a magnetic sensor. a capacitive sensor or an inductive sensor.The position measurement system PMS may determine the position relativeto a reference, for example the metrology frame MF or the projectionsystem PS. The position measurement system PMS may determine theposition of the substrate table WT and/or the mask support MT bymeasuring the position or by measuring a time derivative of theposition, such as velocity or acceleration.

The position measurement system PMS may comprise an encoder system. Anencoder system is known from for example, United States PatentApplication Publication No. US 2007/0058173, which is incorporatedherein in its entirety by reference. The encoder system comprises anencoder head, a grating and a sensor. The encoder system may receive aprimary radiation beam and a secondary radiation beam. Both the primaryradiation beam as well as the secondary radiation beam originate fromthe same radiation beam, i.e., the original radiation beam. The primaryradiation beam and/or the secondary radiation beam is created bydiffracting the original radiation beam with the grating. If both theprimary radiation beam and the secondary radiation beam are created bydiffracting the original radiation beam with the grating, the primaryradiation beam needs to have a different diffraction order than thesecondary radiation beam. Different diffraction orders are, for example,+1^(st) order, −1^(st) order, +2^(nd) order and −2^(nd) order. Theencoder system optically combines the primary radiation beam and thesecondary radiation beam into a combined radiation beam. A sensor in theencoder head determines a phase or phase difference of the combinedradiation beam. The sensor generates a signal based on the phase orphase difference. The signal is representative of a position of theencoder head relative to the grating. Either of the encoder head or thegrating may be arranged on the substrate structure WT. The other of theencoder head or the grating may be arranged on the metrology frame MF orthe base frame BF. For example, a plurality of encoder heads arearranged on the metrology frame MF, whereas a grating is arranged on atop surface of the substrate support WT. In another example, a gratingis arranged on a bottom surface of the substrate support WT, and anencoder head is arranged below the substrate support WT.

The position measurement system PMS may comprise an interferometersystem. An interferometer system is known from, for example, U.S. Pat.No. 6,020,964, which is hereby incorporated in its entirety byreference. The interferometer system may comprise a beam splitter, amirror, a reference mirror and a sensor. A beam of radiation is split bythe beam splitter into a reference beam and a measurement beam. Themeasurement beam propagates to the mirror and is reflected by the mirrorback to the beam splitter. The reference beam propagates to thereference mirror and is reflected by the reference mirror back to thebeam splitter. At the beam splitter, the measurement beam and thereference beam are combined into a combined radiation beam. The combinedradiation beam is incident on the sensor. The sensor determines a phaseor a frequency of the combined radiation beam. The sensor generates asignal based on the phase or the frequency. The signal is representativeof a displacement of the mirror. In an embodiment, the mirror isconnected to the substrate support WT. The reference mirror may beconnected to the metrology frame MF. In an embodiment, the measurementbeam and the reference beam are combined into a combined radiation beamby an additional optical component instead of the beam splitter.

In the manufacture of complex devices, typically many lithographicpatterning steps are performed, thereby forming functional features insuccessive layers on the substrate. A significant aspect of performanceof the lithographic apparatus is therefore the ability to place theapplied pattern correctly and accurately in relation to features laiddown in previous layers (by the same apparatus or a differentlithographic apparatus). For this purpose, the substrate is providedwith one or more sets of marks. Each mark is a structure whose positioncan be measured at a later time using a position sensor, typically anoptical position sensor. The position sensor may be referred to as“alignment sensor” and marks may be referred to as “alignment marks”. Amark may also be referred to as a metrology target.

A lithographic apparatus may include one or more (e.g. a plurality of)alignment sensors by which positions of alignment marks provided on asubstrate can be measured accurately. Alignment (or position) sensorsmay use optical phenomena such as diffraction and interference to obtainposition information from alignment marks formed on the substrate. Anexample of an alignment sensor for use in a lithographic apparatus isbased on a self-referencing interferometer as described in U.S. Pat. No.6,961,116, which is incorporated herein in its entirety by reference.Various enhancements and modifications of the position sensor have beendeveloped, for example as disclosed in U.S. Patent ApplicationPublication No. US 20150261097, which is incorporated herein in itsentirety by reference.

A mark, or alignment mark, may comprise a series of bars formed on or ina layer provided on the substrate or formed (directly) in the substrate.The bars may be regularly spaced and act as grating lines so that themark can be regarded as a diffraction grating with a well-known spatialperiod (pitch). Depending on the orientation of these grating lines, amark may be designed to allow measurement of a position along the Xaxis, or along the Y axis (which is oriented substantially perpendicularto the X axis). A mark comprising bars that are arranged at +45 degreesand/or −45 degrees with respect to both the X- and Y-axes allows for acombined X- and Y-measurement using techniques as described in U.S.Patent Application Publication No. US2009/195768A, which is incorporatedherein in its entirety by reference.

The alignment sensor scans each mark optically with a spot of radiationto obtain a periodically varying signal, such as a sine wave. The phaseof this signal is analyzed to determine the position of the mark and,hence, of the substrate relative to the alignment sensor, which, inturn, is fixated relative to a reference frame of a lithographicapparatus. So-called coarse and fine marks may be provided, related todifferent (coarse and fine) mark dimensions, so that the alignmentsensor can distinguish between different cycles of the periodic signal,as well as the exact position (phase) within a cycle. Marks of differentpitches may also be used for this purpose.

Measuring the position of the marks may also provide information on adeformation of the substrate on which the marks are provided, forexample in the form of a wafer grid. Deformation of the substrate mayoccur by, for example, electrostatic clamping of the substrate to thesubstrate table and/or heating of the substrate when the substrate isexposed to radiation.

FIG. 6 is a schematic block diagram of an embodiment of an alignmentsensor AS. An embodiment of such an alignment is described, for example,in U.S. Pat. No. 6,961,116, which is incorporated herein in its entiretyby reference. Radiation source RSO provides a beam RB of radiation ofone or more wavelengths, which is diverted by diverting optics onto amark, such as mark AM located on substrate W, as an illumination spotSP. In this example the diverting optics comprises a spot mirror SM andan objective lens OL. The illumination spot SP, by which the mark AM isilluminated, may be slightly smaller in width than the width of the markitself.

Radiation diffracted by the mark AM is collimated (in this example viathe objective lens OL) into an information-carrying beam IB. The term“diffracted” is intended to include zero-order diffraction from the mark(which may be referred to as reflection). A self-referencinginterferometer SRI, e.g. of the type disclosed in U.S. Pat. No.6,961,116 mentioned above, interferes the beam IB with itself afterwhich the beam is received by a photodetector PD. Additional optics (notshown) may be included to provide separate beams in case more than onewavelength is created by the radiation source RSO. The photodetector maybe a single element, or it may comprise a number of pixels, if desired.The photodetector may comprise a sensor array.

The diverting optics, which in this example comprises the spot mirrorSM, may also serve to block zero order radiation reflected from themark, so that the information-carrying beam IB comprises only higherorder diffracted radiation from the mark AM (this is not essential tothe measurement, but improves signal to noise ratios).

Intensity signals SI are supplied to a processing unit PU. By acombination of optical processing in the block SRI and computationalprocessing in the unit PU, values for X- and Y-position on the substraterelative to a reference frame are output.

A single measurement of the type illustrated only fixes the position ofthe mark within a certain range corresponding to one pitch of the mark.Coarser measurement techniques are used in conjunction with this toidentify which period of a sine wave is the one containing the markedposition. The same process at coarser and/or finer levels may berepeated at different wavelengths for increased accuracy and/or forrobust detection of the mark irrespective of the materials from whichthe mark is made, and materials on and/or below which the mark isprovided. The wavelengths may be multiplexed and de-multiplexedoptically so as to be processed simultaneously, and/or they may bemultiplexed by time division or frequency division.

In this example, the alignment sensor and spot SP remain stationary,while it is the substrate W that moves. The alignment sensor can thus bemounted rigidly and accurately to a reference frame, while effectivelyscanning the mark AM in a direction opposite to the direction ofmovement of substrate W. The substrate W is controlled in this movementby its mounting on a substrate support and a substrate positioningsystem controlling the movement of the substrate support. A substratesupport position sensor (e.g. an interferometer) measures the positionof the substrate support (not shown). In an embodiment, one or more(alignment) marks are provided on the substrate support. A measurementof the position of the marks provided on the substrate support allowsthe position of the substrate support as determined by the positionsensor to be calibrated (e.g. relative to a frame to which the alignmentsystem is connected). A measurement of the position of the alignmentmarks provided on the substrate allows the position of the substraterelative to the substrate support to be determined.

Metrology tools MT, such as a scatterometer, topography measurementsystem, or position measurement system mentioned above may use radiationoriginating from a radiation source to perform a measurement. One ormore properties of the radiation used by a metrology tool may affect thetype and quality of measurements that may be performed. For someapplications, it may be advantageous to use multiple radiationfrequencies to measure a substrate, for example broadband radiation maybe used. Multiple different frequencies may be able to propagate,irradiate, and scatter off a metrology target with no or minimalinterference with other frequencies. Therefore different frequencies mayfor example be used to obtain more metrology data simultaneously.Different radiation frequencies may also be able to interrogate anddiscover different properties of a metrology target. Broadband radiationmay be useful in metrology systems MT such as for example level sensors,alignment mark measurement systems, scatterometry tools, or inspectiontools. A broadband radiation source may be a supercontinuum source.

High quality broadband radiation, for example supercontinuum radiation,may be difficult to generate. One method for generating broadbandradiation may be to broaden high-power narrow band or single frequencyinput radiation, for example making use of non-linear, higher ordereffects. The input radiation (which may be produced using a laser) maybe referred to as pump radiation. Alternatively, the input radiation maybe referred to as seed radiation. To obtain high power radiation forbroadening effects, radiation may be confined into a small area so thatstrongly localized high intensity radiation is achieved. In those areas,the radiation may interact with broadening structures and/or materialsforming a non-linear medium so as to create broadband output radiation.In the high intensity radiation areas, different materials and/orstructures may be used to enable and/or improve radiation broadening byproviding a suitable non-linear medium.

In some implementations, as discussed further below with reference toFIG. 8, one or more methods and apparatuses for broadening inputradiation may use a fiber for confining input radiation, and forbroadening the input radiation to output broadband radiation. The fibermay be a hollow core fiber, and may comprise internal structures toachieve effective guiding and confinement of radiation in the fiber. Thefiber may be a hollow core photonic crystal fiber (HC-PCF), which isparticularly suitable for strong radiation confinement, predominantlyinside the hollow core of the fiber, achieving high radiation intensity.The hollow core of the fiber may be filled with a gas acting as abroadening medium for broadening input radiation. Such a fiber and gasarrangement may be used to create a supercontinuum radiation source.Radiation input to the fiber may be electromagnetic radiation, forexample radiation in one or more of the infrared, visible, UV, andextreme UV spectra. The output radiation may consist of or comprisebroadband radiation. Such broadband radiation may be referred to hereinas “white light”.

Some embodiments relate to a new design of such a broadband radiationsource comprising an optical fiber. In an embodiment, the optical fiberis a hollow-core, photonic crystal fiber (HC-PCF). In particular, theoptical fiber may be a hollow-core, photonic crystal fiber of a typecomprising anti-resonant structures for confinement of radiation. Suchfibers comprising anti-resonant structures are known as anti-resonantfibers, tubular fibers, single-ring fibers, negative curvature fibers orinhibited coupling fibers. Various different designs of such fibers areknown. Alternatively, the optical fiber may be a photonic bandgap fiber(for example a Kagome fiber).

An example of an optical fiber for use in the radiation source is nowdescribed with reference to FIG. 7, which is a schematic cross sectionalview of the optical fiber 100 in a transverse plane.

The optical fiber 100 comprises an elongate body, which is longer in onedimension compared to the other two dimensions of the fiber 100. Thislonger dimension may be referred to as an axial direction and may definean axis of the optical fiber 100. The two other dimensions define aplane which may be referred to as a transverse plane. FIG. 7 shows across-section of the optical fiber 100 in this transverse plane (i.e.perpendicular to the axis), which is labelled as the x-y plane. Thetransverse cross-section of the optical fiber 100 may be substantiallyconstant along the fiber axis.

It will be appreciated that the optical fiber 100 has some degree offlexibility and therefore the direction of the axis will not, ingeneral, be uniform along the length of the optical fiber 100. The termssuch as the optical axis, the transverse cross-section and the like willbe understood to mean the local optical axis, the local transversecross-section and so on. Furthermore, where components are described asbeing cylindrical or tubular these terms will be understood to encompasssuch shapes that may have been distorted as the optical fiber 100 isflexed.

The optical fiber 100 may have any length and it will be appreciatedthat the length of the optical fiber 100 may be dependent on theapplication. The optical fiber 100 may have a length between 1 cm and 20m, for example, the optical fiber 100 may have a length between 1 cm and10 m, or for example, the optical fiber 100 may have a length between 10cm and 100 cm.

The optical fiber 100 comprises: a hollow core 102; a cladding portionsurrounding the hollow core 102; and a support portion 108 surroundingand supporting the cladding portion. The optical fiber 100 may beconsidered to comprise a body (comprising the cladding portion and thesupport portion 108) having a hollow core 102. The cladding portioncomprises a plurality of anti-resonance elements for guiding radiationthrough the hollow core 102. In particular, the plurality ofanti-resonance elements are arranged to confine radiation thatpropagates through the optical fiber 100 predominantly inside the hollowcore 102 and to guide the radiation along the optical fiber 100. Thehollow core 102 of the optical fiber 100 may be disposed substantiallyin a central region of the optical fiber 100, so that the axis of theoptical fiber 100 may also define an axis of the hollow core 102 of theoptical fiber 100.

In an embodiment, the cladding portion comprises a plurality ofanti-resonance elements for guiding radiation propagating through theoptical fiber 100. In particular, in this embodiment, the claddingportion comprises a single ring of six tubular capillaries 104. Each ofthe tubular capillaries 104 acts as an anti-resonance element.

The capillaries 104 may also be referred to as tubes. The capillaries104 may be circular in cross section, or may have another shape. Eachcapillary 104 comprises a generally cylindrical wall portion 105 that atleast partially defines the hollow core 102 of the optical fiber 100 andseparates the hollow core 102 from a capillary cavity 106. It will beappreciated that the wall portion 105 may act as an anti-reflectingFabry-Perot resonator for radiation that propagates through the hollowcore 102 (and which may be incident on the wall portion 105 at a grazingincidence angle). The thickness of the wall portion 105 may be suitableso as to help ensure that reflection back into the hollow core 102 isgenerally enhanced whereas transmission into the capillary cavity 106 isgenerally suppressed. In some embodiments, the capillary wall portion105 may have a thickness between 0.01-10.0 μm.

It will be appreciated that, as used herein, the term cladding portionis intended to mean a portion of the optical fiber 100 for guidingradiation propagating through the optical fiber 100 (i.e. thecapillaries 104 which confine the radiation within the hollow core 102).The radiation may be confined in the form of transverse modes,propagating along the fiber axis.

The support portion is generally tubular and supports the capillaries104 of the cladding portion. The capillaries 104 are distributed evenlyaround an inner surface if the inner support portion 108. In anembodiment, the capillaries 104 may be described as being disposed in agenerally hexagonal formation.

The capillaries 104 are arranged so that each capillary is not incontact with any of the other capillaries 104. Each of the capillaries104 is in contact with the inner support portion 108 and spaced apartfrom adjacent capillaries 104 in the ring structure. Such an arrangementmay be beneficial since it may increase a transmission bandwidth of theoptical fiber 100 (relative, for example, to an arrangement wherein thecapillaries are in contact with each other). Alternatively, in someembodiments, one or more of the capillaries 104 may be in contact withone or more adjacent capillaries 104 in the ring structure.

The capillaries 104 of the cladding portion are disposed in a ringstructure around the hollow core 102. An inner surface of the ringstructure of capillaries 104 at least partially defines the hollow core102 of the optical fiber 100. The width (e.g., diameter) of the hollowcore 102 (which may be defined as the smallest dimension between opposedcapillaries, indicated by arrow 114) may be between 10 and 1000 μm. Thewidth 114 of the hollow core 102 may affect the mode fieldwidth/diameter, impact loss, dispersion, modal plurality, andnon-linearity properties of the hollow core optical fiber 100.

In this embodiment, the cladding portion comprises a single ringarrangement of capillaries 104 (which act as anti-resonance elements).Therefore, a line in any radial direction from a center of the hollowcore 102 to an exterior of the optical fiber 100 passes through no morethan one capillary 104.

It will be appreciated that other embodiments may be provided withdifferent arrangements of anti-resonance elements. These may includearrangements having multiple rings of anti-resonance elements andarrangements having nested anti-resonance elements. Furthermore,although the embodiment shown in FIG. 7 comprises a ring of sixcapillaries, in other embodiments, one or more rings comprising anynumber of anti-resonance elements (for example 4, 5, 6, 7, 8, 9, 10, 11or 12 capillaries) may be provided in the cladding portion. Optionally,the support portion 108 may comprise a deformable portion to at leastpartially isolate the cladding portion from external stresses.

FIG. 8 depicts an embodiment of a radiation source 134 for providingbroadband output radiation. The ration source 134 comprises a pulsedpump radiation source 136; an optical fiber 100 (of the type shown inFIG. 7) with a hollow core 102; and a working medium 126 (for example agas) disposed within the hollow core 102. Although in FIG. 8 theradiation source 134 comprises the optical fiber 100 shown in FIG. 7, inalternative embodiments other types of hollow core optical fiber may beused.

The pulsed pump radiation source 136 is configured to provide inputradiation 122. The hollow core 102 of the optical fiber 100 is arrangedto receive the input radiation 122 from the pulsed pump radiation source136, and broaden it to provide output radiation 124. The working medium126 enables the broadening of the frequency range of the received inputradiation 122 so as to provide broadband output radiation 124.

The radiation source 134 further comprises a reservoir 128. The opticalfiber 100 is disposed inside the reservoir 128. The reservoir 128 mayalso be referred to as a housing or container. The reservoir 128 isconfigured to contain the working medium 126. The reservoir 128 maycomprise one or more features, known in the art, for controlling,regulating, and/or monitoring the composition of the working medium 126(which may be a gas) inside the reservoir 128. The reservoir 128 maycomprise a first transparent window 130. In use, the optical fiber 100is disposed inside the reservoir 128 such that the first transparentwindow 130 is located proximate to an input end 110 of the optical fiber100. The first transparent window 130 may form part of a wall of thereservoir 128. The first transparent window 130 may be transparent forat least the received one or more input radiation frequencies, so thatreceived input radiation 122 (or at least a large portion thereof) maybe coupled into the optical fiber 100 located inside reservoir 128. Itwill be appreciated that optics (not shown) may be provided for couplingthe input radiation 122 into the optical fiber 100.

The reservoir 128 comprises a second transparent window 132, formingpart of a wall of the reservoir 128. In use, when the optical fiber 100is disposed inside the reservoir 128, the second transparent window 132is located proximate to an output end 112 of the optical fiber 100. Thesecond transparent window 132 may be transparent for at least thefrequencies of the broadband output radiation 124 of the apparatus 120.

In an embodiment, the two opposed ends of the optical fiber 100 may beplaced inside different reservoirs. The optical fiber 100 may comprise afirst end section configured to receive input radiation 122, and asecond end section for outputting broadband output radiation 124. Thefirst end section may be placed inside a first reservoir, comprising aworking medium 126. The second end section may be placed inside a secondreservoir, wherein the second reservoir may also comprise a workingmedium 126. The functioning of the reservoirs may be as described inrelation to FIG. 8 above. The first reservoir may comprise a firsttransparent window, configured to be transparent for input radiation122. The second reservoir may comprise a second transparent windowconfigured to be transparent for broadband output broadband radiation124. The first and second reservoirs may also comprise a sealableopening to permit the optical fiber 100 to be placed partially insideand partially outside the reservoir, so that a gas can be sealed insidethe reservoir. The optical fiber 100 may further comprise a middlesection not contained inside a reservoir. Such an arrangement using twoseparate gas reservoirs may be particularly convenient for embodimentswherein the optical fiber 100 is relatively long (for example when thelength is more than 1 m). It will be appreciated that for sucharrangements which use two separate gas reservoirs, the two reservoirs(which may comprise one or more features, known in the art, forcontrolling, regulating, and/or monitoring the composition of a gasinside the two reservoirs) may be considered to provide an apparatus forproviding the working medium 126 within the hollow core 102 of theoptical fiber 100.

In this context a window may be transparent for a frequency if at least50%, 75%, 85%, 90%, 95%, or 99% of incident radiation of that frequencyon the window is transmitted through the window.

Both the first 130 and the second 132 transparent windows may form agastight seal within the walls of the reservoir 128 so that the workingmedium 126 (which may be a gas) may be contained within the reservoir128. It will be appreciated that the gas 126 may be contained within thereservoir 128 at a pressure different to the ambient pressure of thereservoir 128.

The working medium 126 may comprise a noble gas. The working medium 126may comprise one or more selected from: argon, krypton, neon, heliumand/or xenon. Alternatively or additionally to the noble gas, theworking component may comprise a molecular gas (e.g. H₂, N₂, O₂, CH₄,SF₆). The working medium 126 may also comprise mixtures of two or moreselected from: argon, krypton, neon, helium, xenon and/or a moleculargas (e.g. H₂, N₂, O₂, CH₄, SF₆). The working medium 126 may beconfigured to produce anomalous dispersion, and, optionally, to produceanomalous dispersion at a wavelength of the input radiation 122. Thatis, the working medium 126 may have a negative group delay dispersionparameter.

In one implementation, the working medium 126 may be disposed within thehollow core 102 at least during receipt of input radiation 122 forproducing broadband output radiation 124. It will be appreciated that,while the optical fiber 100 is not receiving input radiation 122 forproducing broadband output radiation, the gas 126 may be wholly orpartially absent from the hollow core 102.

In order to achieve frequency broadening, high intensity radiation maybe desirable. An advantage of having a hollow core optical fiber 100 isthat it may achieve high intensity radiation through strong spatialconfinement of radiation propagating through the optical fiber 100,achieving high localized radiation intensities. The radiation intensityinside the optical fiber 100 may be high, for example due to highreceived input radiation intensity and/or due to strong spatialconfinement of the radiation inside the optical fiber 100. An advantageof hollow core optical fibers is that they can guide radiation having abroader wavelength range than solid-core fibers and, in particular,hollow core optical fibers can guide radiation in both the ultravioletand infrared ranges.

An advantage of using a hollow core optical fiber 100 may be that themajority of the radiation guided inside the optical fiber 100 isconfined to the hollow core 102. Therefore, the majority of theinteraction of the radiation inside the optical fiber 100 is with theworking medium 126, which is provided inside the hollow core 102 of theoptical fiber 100. As a result, the broadening effects of the workingmedium 126 on the radiation may be increased.

The received input radiation 122 may be electromagnetic radiation. Theinput radiation 122 may be received as pulsed radiation. For example,the input radiation 122 may comprise ultrafast pulses.

The input radiation 122 may be coherent radiation. The input radiation122 may be collimated radiation, an advantage of which may be tofacilitate and improve the efficiency of coupling the input radiation122 into the optical fiber 100. The input radiation 122 may comprise asingle frequency, or a narrow range of frequencies. The input radiation122 may be generated by a laser. Similarly, the output radiation 124 maybe collimated and/or may be coherent.

The broadband range of the output radiation 124 may be a continuousrange, comprising a continuous range of radiation frequencies. Theoutput radiation 124 may comprise supercontinuum radiation. Continuousradiation may be beneficial for use in a number of applications, forexample in metrology applications. For example, the continuous range offrequencies may be used to interrogate a large number of properties. Thecontinuous range of frequencies may for example be used to determineand/or eliminate a frequency dependency of a measured property.Supercontinuum output radiation 124 may comprise for exampleelectromagnetic radiation over a wavelength range of 100 nm-4000 nm. Thebroadband output radiation 124 frequency range may be for example 400nm-900 nm, 500 nm-900 nm, or 200 nm-2000 nm. The supercontinuum outputradiation 124 may comprise white light.

The input radiation 122 provided by the pulsed pump radiation source 136may be pulsed. The input radiation 122 may comprise electromagneticradiation of one or more frequencies between 200 nm and 2 μm. The inputradiation 122 may for example comprise electromagnetic radiation with awavelength of 1.03 μm. The repetition rate of the pulsed radiation 122may be of an order of magnitude of 1 kHz to 100 MHz. The pulse energiesmay have an order of magnitude of 0.01 μJ to 100 μJ, for example 0.1 μJto 100 μJ, or for example 1-10 μJ. A pulse duration for the inputradiation 122 may be between 10 fs and 10 ps, for example 300 fs. Theaverage power of input radiation 122 may be between 100 mW to several100 W. The average power of input radiation 122 may for example be 20-50W.

The broadband output radiation 124 provided by the radiation source 134may have an average output power of at least 1 W. The average outputpower may be at least 5 W. The average output power may be at least 10W. The broadband output radiation 124 may be pulsed broadband outputradiation 124. The broadband output radiation 124 may have a powerspectral density in the entire wavelength band of the output radiationof at least 0.01 mW/nm. The power spectral density in the entirewavelength band of the broadband output radiation may be at least 3mW/nm.

Some embodiments relate to radiation sources of the form of theradiation source 134 shown in FIG. 8 comprising a hollow core opticalfiber 100; a working medium 126 disposed within the hollow core; and apulsed pump radiation source 136 arranged to produce pulsed pumpradiation 122 that is received by, and propagates through, the hollowcore from an input end 110 to an output end 112. In particular, someembodiments relate to such a radiation source wherein one or moreparameters of the pulsed pump radiation 122, the optical fiber 100 andthe working medium 126 are configured to allow soliton self-compressionof the pulsed pump radiation 122 so as to change a spectrum of thepulsed pump radiation 122 so as to form output radiation 124.

Some broadband radiation sources use arrangements which produce spectralbroadening of pulsed pump radiation but wherein parameters of the pulsedpump radiation, the optical fiber and the working medium are configuredto allow modulational instability to produce the spectral broadening.There are a number of reasons why modulational instability is used toproduce the spectral broadening. First, modulational instability isknown to produce broadband radiation having a relatively flatintensity-wavelength distribution, provided a sufficient number ofpulses are averaged. Such a broadband radiation source may be referredto as a white light radiation source (due to the relatively flatspectral intensity distribution). Second, modulational instability canbe achieved using relatively economical laser sources as the pumpradiation source.

On the other hand, in the regime of soliton self-compression an inputpulse undergoes compression in the time domain, which is accompanied byan increase in a width of the spectrum. Following solitonself-compression, the compressed pulse undergoes soliton fission,wherein the pulse splits into a plurality of solitons. This solitonfission results in temporal broadening of the radiation pulse and ashifting of the spectrum.

In some embodiments, a length of the optical fiber 100 is such that theoutput end 112 substantially coincides with a position at which solitonself-compression occurs but before soliton fission starts. This providesa particularly stable broadband radiation source that is relativelysmooth and does not have any significant gaps in its spectrum.

In some embodiments, the length of the optical fiber 100 is such thatthe output end 112 substantially coincides with a position at which atemporal extent of the output radiation 124 is smaller than a firstthreshold value, or, optionally, the temporal extent of the outputradiation 124 is minimal. The first threshold value may be chosen suchthat a wide enough output radiation spectrum is obtained. In practicethe compressed pulse leaving the output end 112 of the fiber 100, istemporally broadened by the second transparent window 132 as a result ofbulk material dispersion. Consequently, a duration of the pulses of theoutput radiation 124 after the second transparent window 132 may berelatively large.

In some embodiments, the length of the optical fiber 100 is such thatthe output end 112 substantially coincides with a position at which abreadth of the spectrum of the output radiation 124 is larger than asecond threshold value, or, optionally, at which the breadth of thespectrum of the output radiation 124 is maximal. The second thresholdvalue may be chosen such that the breadth of the spectrum is largeenough to fulfil a bandwidth requirement of a certain application, e.g.a requirement of a metrology sensor.

In some embodiments, the length of the optical fiber 100 is such thatthe output end 112 substantially coincides with a position at which thespectrum of the output radiation 124 is substantially continuous.

Such radiation sources are advantageous since they allow a stable,broadband output radiation beam 124 to be produced at the output end112, as now discussed. Such a stable, broadband output radiation beam124 may be useful for use within a metrology apparatus, for examplewithin a lithographic apparatus.

In a soliton self-compression regime (with a relatively low solitonnumber) a pulse of radiation can undergo significant temporalcompression, which is accompanied by spectral broadening. Eventually,the temporal compression will reach a maximal level (corresponding to aminimum temporal extent of the pulsed radiation) followed by temporalbroadening of the radiation (soliton fission). The (higher order)soliton may oscillate between periods of temporal compression andtemporal broadening as it propagates along the hollow core opticalfiber. Following temporal broadening, other effects can lead to shiftingof the spectrum of the radiation. For example, self-steepening (whichmay accompany and aid the soliton self-compression) can lead to anoptical shock which can seed dispersive wave emission. By tuning one ormore parameters of the system, a particular, desirable wavelength may begenerated. For example, the wavelength may be selected so as to besuitable for interacting with a particular molecule and used in researchexperiments studying the molecule. Therefore, soliton self-compressionis an effective regime for generating from an input pump laser beamhaving first wavelength, an output radiation beam having a second,shifted wavelength.

It has been realized that during soliton self-compression, before thetemporal broadening (and before any dispersive waves are formed), thereis a (short-lived) transition period during which the radiationpropagating through the hollow-core fiber is broadband radiation (i.e.having a broad, relatively flat spectrum with no significant gaps in thespectral density spectrum). Furthermore, it has been realized that,although this broadband radiation is short lived, by selecting thelength of the optical fiber 100 such that the output end 112substantially coincides with a position at which the solitonself-compression has occurred but before subsequent temporal broadeningand shifting of the spectrum, this broadband radiation can be outputfrom the optical fiber 100 so as to provide a particularly stablebroadband radiation source 134.

In particular, a particularly stable broadband radiation source 134 canbe provided if the length of the optical fiber 100 is such that theoutput end 112 substantially coincides with a position at which atemporal extent of the radiation is minimal.

Generally, after the soliton self-compression, the breadth of thespectrum of the pulsed radiation may decrease and/or gaps in thespectrum may develop (for example as the soliton evolves and asdispersive waves are emitted). Therefore, a particularly stable and flatbroadband radiation source can be provided if the length of the opticalfiber 100 is such that the output end 112 substantially coincides with aposition at which a breadth of the spectrum of the radiation is maximal.Or, a particularly stable and flat broadband radiation source can beprovided if the length of the optical fiber 100 is such that the outputend 112 substantially coincides with a position at which the spectrum ofthe radiation is substantially continuous.

In contrast to noise-seeded modulational instability systems, broadbandradiation generated by such soliton self-compression will havesubstantially no shot-to-shot variations. As a result, advantageously, astable output spectrum can be generated using a single pulse. Incontrast, several pulses would be required to produce some stability inthe output beam of a modulational instability system.

It will be appreciated that as the radiation propagates through thehollow core fiber 100 the soliton may oscillate between periods oftemporal compression and temporal broadening. In between each period oftemporal compression and temporal broadening there may be a localminimum in the temporal extent of the radiation. In principle, thelength of the optical fiber 100 may be such that the output end 112substantially coincides with any such position of minimal temporalextent of the radiation. However, a most stable (for example againstpulse to pulse variations) and flattest output spectrum may be providedwhen the output end 112 coincides with the first position of minimaltemporal extent of the radiation.

Some embodiments relate to radiation sources which exploit solitonself-compression and wherein a pulse duration of the input pulsed pumpradiation 122 is greater than 50 fs, and, optionally, the pulse durationof the input pulsed pump radiation 122 is smaller or equal to 400 fs.For example, the pulse duration of the input pulsed pump radiation 122may be greater than 100 fs, for example of the order of 150 fs.

Some embodiments relate to radiation sources which exploit solitonself-compression and wherein a pulse energy of the input pulsed pumpradiation is less than 1 μJ, and, optionally, the pulse energy of theinput pulsed pump radiation is larger than or equal to 0.1 μJ.

The soliton order N of the input pulsed pump radiation 122 is aconvenient parameter that can be used to distinguish conditions underwhich spectral broadening is dominated by modulational instability andconditions under which spectral broadening is dominated by solitonself-compression. The soliton order N of the input pulsed pump radiation122 is given by:

$\begin{matrix}{N = \sqrt{\gamma\frac{P_{p}\tau^{2}}{\left| \beta_{2} \right|}}} & (1)\end{matrix}$

where γ is a nonlinear phase (or nonlinear parameter); P_(p) is a pumppeak power of the input pulsed pump radiation 122; τ is a pump pulseduration of the input pulsed pump radiation 122; and β₂ is thegroup-velocity dispersion of the working medium 126.

Spectral broadening is typically dominated by modulational instabilitywhen N>>20 whereas spectral broadening is typically dominated by solitonself-compression when N<<20.

Therefore, for arrangements which use soliton self-compression it isdesirable to produce input pulsed pump radiation 122 with a low solitonorder N. Furthermore, as can be seen from equation (1), the solitonorder of the input pulsed pump radiation 122 is proportional to thepulse duration τ of the input pulsed pump radiation 122. Therefore,generally prior art arrangements wherein soliton self-compressiondominates, the pulse duration τ of the input pulsed pump radiation 122is typically reduced to of the order of 30 fs or less. To realize suchan arrangement, typically a compressed, high-power femtosecond-fiberlaser or Ti:Sapph amplifier is used as the pulsed pump radiation source136. A Ti:Sapph amplifier can produce pulsed radiation with a pulseduration τ of the order of 30 fs or less. High-power, femtosecond-fiberlasers typically have pulse durations of 300 fs and therefore knownsoliton self-compression arrangements that use femtosecond-fiber lasersalso comprise a system for compressing this pulse duration to, forexample, 30 fs. Such a system for compressing the pulse duration may,for example, use self-phase modulation based spectral broadening andphase compression using chirped mirrors or gratings. The laser heads arerelatively bulky (a femtosecond-fiber laser head has, for example,dimensions of 60×40×20 cm) and, in most cases, require externalcontrollers and water chillers. In addition, such lasers are relativelycost intensive.

It has been realized that the soliton order of the input pulsed pumpradiation can alternatively be reduced by reducing the pulse energyE_(p) of the input pulsed pump radiation (where E_(p)=P_(p)τ). Forexample, if all other parameters remain constant, by reducing the pulseenergy E_(p) of the input pulsed pump radiation by a factor of α, thesame soliton order can be achieved using a pulse duration that isincreased by a factor of α. This reduction of the pulse energy iscontrary to the teachings of the prior art wherein it is taught to useincreased pulse energy. In the prior art, radiation sources usingsoliton self-compression are typically used for research applicationssuch as, for example atomic or molecular spectroscopy wherein it isdesirable to maximize the pulse energy of the radiation source.

An example embodiment is now discussed with reference to FIGS. 9A to10B.

FIGS. 9A and 9B show a simulation of the temporal and spectral evolutionof a pulse of radiation within the hollow core optical fiber 100. Thehollow core optical fiber 100 has a core diameter of 32.5 μm, which isfilled with a working medium 126 of Krypton gas at a pressure of 10 bar.The input pulsed pump radiation 122 has a pump pulse duration of τ of150 fs, a pulse energy E_(p) of 0.4 μJ energy and a wavelength of 1030nm. This pulse energy E_(p) is approximately one order of magnitudelower than is currently used in modulational instability drivenbroadband radiation sources. This configuration allows pumping in theanomalous dispersion regime (β₂=−6.3 fs²/cm at the pump wavelength of1030 nm). The soliton order of N=17 allows soliton self-compression ofthe pulsed pump radiation 122 so as to change a spectrum of the pulsedpump radiation so as to form output radiation 124.

In a first portion of the optical fiber 100, the radiation undergoesself-phase modulation 140. This is followed by soliton self-compression142, a temporal extent of the radiation being minimal at a distance ofapproximately 110 cm from the first end 112 of the optical fiber 100(see FIG. 9A). As can be seen in FIG. 9B, this soliton self-compressionis accompanied by significant broadening 144 of the spectrum of theradiation. The second end 114 of the optical fiber 100 coincides withthe position 142 at which the temporal extent of radiation is minimal.

FIG. 9C shows the output spectrum 146 of the radiation source 134. Alsoshown is the spectrum 148 of the input pulsed pump radiation 122. It canbe seen that a flatness of about 10 dB is realized in the 500-900 nmband. Note, that the output spectrum 146 has been computed for a singleshot, the smoothness is a result from the stability against smallperturbations.

Note that the pulse used in the above example embodiment have a pulseduration of τ of 150 fs, which is significantly larger than typicalpulse durations (>30 fs) used for soliton self-compression. Furthermore,such pulses can readily be produced by a new class of lasers thatprovide pulse durations in between Ti:Sapph amplifiers (30 fs) andhigh-power fiber lasers (300 fs) and come at a dramatically reducedvolume or cost recently. An example of a suitable laser is the lasermarketed as Goji by Amplitude Systemes SA, a company incorporated inFrance.

FIG. 10A shows a simulation of the spectral evolution of a pulse ofradiation within the hollow core optical fiber 100 that would beexperienced if the length of the optical fiber was increased to 150 cm(i.e. so that the second end 114 of the optical fiber 100 no longercoincides with the position 142 at which the temporal extent ofradiation is minimal). FIG. 10B shows the output spectrum 150 of theradiation source 134 with this increased length of optical fiber. Alsoshown is the spectrum 148 of the input pulsed pump radiation 122.

It can be seen that following the soliton self-compression andassociated spectral broadening 144, the spectrum of radiation undergoesa number of changes. For example, a dispersive wave 152 is emitted andthe radiation oscillates between periods of spectral compression andspectral broadening.

Furthermore, it can clearly be seen from the output spectrum 150 in FIG.10B that the flatness of the output spectrum is lost once the second end114 of the optical fiber 100 no longer coincides with the position 142at which the temporal extent of radiation is minimal. The spectrum is nolonger smooth, having a number of peaks and troughs.

According to some embodiments there is also provided a method ofselecting an operating regime of a radiation source 134 of the typeshown in FIG. 8.

The method may comprise: selecting one or more parameters of one or moreselected from: the pulsed pump radiation 122 (for example the a pumppulse duration of τ of and/or the pulse energy E_(p)), the optical fiber100 (for example the geometry, core diameter, etc.) and/or the workingmedium 126 (for example the gas composition, pressure, etc.) so as toallow soliton self-compression and such that an output end of theoptical fiber 100 substantially coincides with a position at which atemporal extent of the radiation is minimal.

In an initial application of the method, one or more parameters of theoptical fiber 100 may be selected. Once the optical fiber 100 has beenmanufactured, its one or more parameters may be determined, for exampleby measurement, and can be input as one or more constraints into asecond application of the method. This may allow the one or more workingparameters of the pulsed pump radiation 122 and/or the working medium126 to be selected when one or more parameters of the optical fiber 100are fixed (for example, once the optical fiber has been manufactured).

The radiation source 134 described above may be provided as part of ametrology arrangement for determining a parameter of interest of astructure on a substrate. The structure on the substrate may for examplebe a lithographic pattern applied to the substrate. The metrologyarrangement may further comprise an illumination sub-system configuredto illuminate the structure on the substrate. The metrology arrangementmay further comprise a detection sub-system configured to detect aportion of radiation scattered and/or reflected by the structure. Thedetection sub-system may further determine the parameter of interest onthe structure from the portion of radiation scattered and/or reflectedby the structure. The parameter may for example be overlay, alignment,or levelling data of the structure on the substrate.

The metrology arrangement described above may form part of a metrologyapparatus MT. The metrology arrangement described above may form part ofan inspection apparatus. The metrology arrangement described above maybe included inside a lithographic apparatus LA.

Further embodiments are disclosed in the subsequent numbered clauses:

-   1. A radiation source comprising:    -   a hollow core optical fiber comprising a body having a hollow        core;    -   a working medium disposed within the hollow core; and    -   a pulsed pump radiation source arranged to produce pulsed pump        radiation that is received by, and propagates through, the        hollow core from an input end to an output end,    -   wherein one or more parameters of the pulsed pump radiation, the        optical fiber and the working medium are configured to allow        soliton self-compression of the pulsed pump radiation so as to        change a spectrum of the pulsed pump radiation so as to form        output radiation, and    -   wherein a length of the optical fiber is such that the output        end substantially coincides with a position at which a temporal        extent of the output radiation is minimal.-   2. A radiation source comprising:    -   a hollow core optical fiber comprising a body having a hollow        core;    -   a working medium disposed within the hollow core; and    -   a pulsed pump radiation source arranged to produce pulsed pump        radiation that is received by, and propagates through, the        hollow core from an input end to an output end,    -   wherein one or more parameters of the pulsed pump radiation, the        optical fiber and the working medium are configured to allow        soliton self-compression of the pulsed pump radiation so as to        change a spectrum of the pulsed pump radiation so as to form        output radiation, and    -   wherein a length of the optical fiber is such that the output        end substantially coincides with a position at which a breadth        of the spectrum of the output radiation is maximal.-   3. The radiation source of clause 1 or clause 2, wherein the length    of the optical fiber is such that the output end substantially    coincides with a first local minimum of a temporal extent of the    pulsed pump radiation.-   4. The radiation source of any of clauses 1-3, wherein a pulse    duration of the input pulsed pump radiation is greater than 50 fs,    and, optionally, the pulse duration of the input pulsed pump    radiation is smaller or equal to 400 fs.-   5. The radiation source of any of clauses 1-4, wherein a pulse    energy of the input pulsed pump radiation is less than 1 μJ, and,    optionally, the pulse energy of the input pulsed pump radiation is    larger than or equal to 0.01 μJ.-   6. A radiation source comprising:    -   a hollow core optical fiber comprising a body having a hollow        core;    -   a working medium disposed within the hollow core; and    -   a pulsed pump radiation source arranged to produce pulsed pump        radiation that is received by, and propagates through, the        hollow core from an input end to an output end,    -   wherein one or more parameters of the pulsed pump radiation, the        optical fiber and the working medium are configured to allow        soliton self-compression of the pulsed pump radiation so as to        change a spectrum of the pulsed pump radiation, and    -   wherein a pulse duration of the input pulsed pump radiation is        greater than 50 fs, and, optionally, the pulse duration of the        input pulsed pump radiation is smaller or equal to 400 fs.-   7. A radiation source comprising:    -   a hollow core optical fiber comprising a body having a hollow        core;    -   a working medium disposed within the hollow core; and    -   a pulsed pump radiation source arranged to produce pulsed pump        radiation that is received by, and propagates through, the        hollow core from an input end to an output end,    -   wherein one or more parameters of the pulsed pump radiation, the        optical fiber and the working medium are configured to allow        soliton self-compression of the pulsed pump radiation so as to        change a spectrum of the pulsed pump radiation, and    -   wherein a pulse energy of the input pulsed pump radiation is        less than 1 μJ, and, optionally, the pulse energy of the input        pulsed pump radiation is larger than or equal to 0.01 μJ.-   8. The radiation source of any of clauses 1-7, wherein a soliton    order of the input pulsed pump radiation is less than 20.-   9. The radiation source of any of clauses 1-8, wherein the working    medium is configured to produce anomalous dispersion, and,    optionally, the working medium is configured to produce anomalous    dispersion at least at a wavelength of the pulsed pump radiation.-   10. The radiation source of any of clauses 1-9, wherein the hollow    core optical fiber comprises a cladding portion surrounding the    hollow core, the cladding portion comprising a plurality of    anti-resonance elements for guiding radiation through the hollow    core.-   11. The radiation source of clause 10, wherein the plurality of    anti-resonance elements of the cladding portion are disposed in a    ring structure around the hollow core.-   12. The radiation source of clause 10 or clause 11, wherein the    plurality of anti-resonance elements is arranged so that each of the    anti-resonance elements is not in contact with any of the other    anti-resonance elements.-   13. The radiation source of any of clauses 1-12, wherein the working    medium comprises a noble gas.-   14. The radiation source of any of clauses 1-13, wherein the working    medium comprises a molecular gas.-   15. A metrology arrangement for determining a parameter of interest    of a structure on a substrate, the metrology arrangement comprising:    -   the radiation source of any of clauses 1-14;    -   an illumination sub-system for illuminating the structure on the        substrate using the broadband output radiation; and    -   a detection sub-system for detecting a portion of radiation        scattered and/or reflected by the structure, and for determining        the parameter of interest from said portion of radiation.-   16. A lithographic apparatus comprising the metrology arrangement    according to clause 15.-   17. A method of selecting an operating regime of a radiation source,    the radiation source comprising:    -   a hollow core optical fiber comprising a body having a hollow        core;    -   a working medium disposed within the hollow core; and    -   a pulsed pump radiation source arranged to produce pulsed pump        radiation that is received by, and propagates through, the        hollow core from an input end to an output end,    -   wherein the method comprises:    -   selecting one or more parameters of one or more selected from:        the pulsed pump radiation, the optical fiber and the working        medium so as to allow soliton self-compression of the pulsed        pump radiation so as to change a spectrum of the pulsed pump        radiation so as to form output radiation,    -   wherein the one or more parameters are selected such that a        length of the optical fiber is such that the output end        substantially coincides with a position at which:        -   a temporal extent of the output radiation is smaller than a            first threshold value, and/or        -   a breadth of the spectrum of the output radiation is larger            than a second threshold value.-   18. The method of clause 17, wherein one or more parameters of the    optical fiber are fixed and wherein one or more parameters of the    pulsed pump radiation and/or the working medium are selected.-   19. The method of clause 17, wherein the one or more parameters are    selected such that a length of the optical fiber is such that the    output end substantially coincides with a position at which:    -   a temporal extent of the output radiation is minimal, and/or    -   a breadth of the spectrum of the output radiation is maximal.

Although specific reference may be made in this text to the use oflithographic apparatus in the manufacture of ICs, it should beunderstood that the lithographic apparatus described herein may haveother applications. Possible other applications include the manufactureof integrated optical systems, guidance and detection patterns formagnetic domain memories, flat-panel displays, liquid-crystal displays(LCDs), thin-film magnetic heads, etc.

Although specific reference may be made in this text to embodiments ofthe invention in the context of a lithographic apparatus, embodiments ofthe invention may be used in other apparatus. Embodiments of theinvention may form part of a mask inspection apparatus, a metrologyapparatus, or any apparatus that measures or processes an object such asa wafer (or other substrate) or mask (or other patterning device). Theseapparatus may be generally referred to as lithographic tools. Such alithographic tool may use vacuum conditions or ambient (non-vacuum)conditions.

Although specific reference may have been made above to the use ofembodiments of the invention in the context of optical lithography, itwill be appreciated that the invention, where the context allows, is notlimited to optical lithography and may be used in other applications,for example imprint lithography.

Although specific reference is made to “metrology apparatus/tool/system”or “inspection apparatus/tool/system”, these terms may refer to the sameor similar types of tools, apparatuses, or systems. For example, theinspection or metrology apparatus that comprises an embodiment of theinvention may be used to determine characteristics of structures on asubstrate or on a wafer. For example, the inspection apparatus ormetrology apparatus that comprises an embodiment of the invention may beused to detect defects of a substrate or defects of structures on asubstrate or on a wafer. In such an embodiment, a characteristic ofinterest of the structure on the substrate may relate to defects in thestructure, the absence of a specific part of the structure, or thepresence of an unwanted structure on the substrate or on the wafer.

While specific embodiments of the invention have been described above,it will be appreciated that the invention may be practiced otherwisethan as described. The descriptions above are intended to beillustrative, not limiting. Thus it will be apparent to one skilled inthe art that modifications may be made to the invention as describedwithout departing from the scope of the claims set out below.

1.-20. (canceled)
 21. A radiation source comprising: a hollow coreoptical fiber comprising a body having a hollow core, the hollow corearranged to have a working medium disposed therein; and a pulsed pumpradiation source arranged to produce pulsed pump radiation that isreceived by, and propagates through, the hollow core from an input endto an output end, wherein one or more parameters of the pulsed pumpradiation, the optical fiber and the working medium are configured toallow soliton self-compression of the pulsed pump radiation so as tochange a spectrum of the pulsed pump radiation, and wherein a pulseduration of the input pulsed pump radiation is greater than 50 fs, andwherein a soliton order of the input pulsed pump radiation is less than20.
 22. The radiation source of claim 21, wherein a pulse energy of theinput pulsed pump radiation is less than 1 μJ.
 23. The radiation sourceof claim 22, wherein the pulse energy of the input pulsed pump radiationis larger than or equal to 0.1 μJ.
 24. The radiation source of claim 21,wherein the working medium is configured to produce anomalousdispersion.
 25. The radiation source of claim 21, wherein the hollowcore optical fiber comprises a cladding portion surrounding the hollowcore, the cladding portion comprising a plurality of anti-resonanceelements configured to guide radiation through the hollow core.
 26. Theradiation source of claim 25, wherein the plurality of anti-resonanceelements is arranged so that each of the anti-resonance elements is notin contact with any of the other anti-resonance elements.
 27. Theradiation source of claim 21, wherein the working medium comprises anoble gas and/or a molecular gas.
 28. A metrology arrangement fordetermining a parameter of interest of a structure on a substrate, themetrology arrangement comprising: the radiation source of claim 21; anillumination sub-system configured to illuminate the structure on thesubstrate using the output radiation; and a detection sub-systemconfigured to detect a portion of radiation scattered and/or reflectedby the structure, and determine the parameter of interest from theportion of radiation.
 29. A radiation source comprising: a hollow coreoptical fiber comprising a body having a hollow core, the hollow corearranged to have a working medium disposed therein; and a pulsed pumpradiation source arranged to produce pulsed pump radiation that isreceived by, and propagates through, the hollow core from an input endto an output end, wherein one or more parameters of the pulsed pumpradiation, the optical fiber and the working medium are configured toallow soliton self-compression of the pulsed pump radiation so as tochange a spectrum of the pulsed pump radiation so as to form outputradiation, and wherein the output end substantially coincides with aposition at which the spectrum of the radiation is substantiallycontinuous.
 30. The radiation source of claim 29, wherein a pulseduration of the input pulsed pump radiation is greater than 50 fs. 31.The radiation source of claim 29, wherein a pulse energy of the inputpulsed pump radiation is less than 1 μJ.
 32. The radiation source ofclaim 29, wherein a soliton order of the input pulsed pump radiation isless than
 20. 33. The radiation source of claim 29, wherein the workingmedium is configured to produce anomalous dispersion.
 34. The radiationsource of claim 29, wherein the hollow core optical fiber comprises acladding portion surrounding the hollow core, the cladding portioncomprising a plurality of anti-resonance elements configured to guideradiation through the hollow core.
 35. The radiation source of claim 29,wherein a length of the optical fiber is such that the output endsubstantially coincides with a position at which a temporal extent ofthe output radiation is minimal.
 36. The radiation source of claim 29,wherein a length of the optical fiber is such that the output endsubstantially coincides with a position at which a breadth of thespectrum of the output radiation is maximal.
 37. The radiation source ofclaim 29, wherein a length of the optical fiber is such that the outputend substantially coincides with a first local minimum of a temporalextent of the pulsed pump radiation.
 38. A metrology arrangement fordetermining a parameter of interest of a structure on a substrate, themetrology arrangement comprising: the radiation source of claim 29; anillumination sub-system configured to illuminate the structure on thesubstrate using the output radiation; and a detection sub-systemconfigured to detect a portion of radiation scattered and/or reflectedby the structure, and determine the parameter of interest from theportion of radiation.
 39. A method of selecting an operating regime of aradiation source, the radiation source comprising: a hollow core opticalfiber comprising a body having a hollow core, the hollow core arrangedto have a working medium disposed therein; and a pulsed pump radiationsource arranged to produce pulsed pump radiation that is received by,and propagates through, the hollow core from an input end to an outputend, wherein the method comprises: selecting one or more parameters ofone or more selected from: the pulsed pump radiation, the optical fiberand the working medium so as to allow soliton self-compression of thepulsed pump radiation so as to change a spectrum of the pulsed pumpradiation so as to form output radiation, and wherein the output endsubstantially coincides with a position at which the spectrum of theradiation is substantially continuous.
 40. The method of claim 39,wherein a pulse energy of the input pulsed pump radiation is less than 1μJ.